页岩的氩离子抛光制样研究

Shale preparation using Ar-ion milling

王亮 章雄冬 曹海虹

Wang Liang Zhang Xiongdong Cao Haihong

中国石化 华东分公司 石油勘探开发研究院, 江苏 扬州 225007

Research Institute of Petroleum Exploration and Development, SINOPEC East China Company, Yangzhou, Jiangsu 225007, China

由于页岩结构的特殊性,其内部存在大量的微孔隙,借助于氩离子抛光技术能够揭示这些孔隙的真实结构。该文对不同加速电压、抛光时间、抛光角度及样品台转速等条件下氩离子束对页岩截面抛光处理的效果进行了研究,通过场发射扫描电镜观察,比较了不同抛光条件下页岩抛光面的形貌。研究表明:适当降低加速电压能够获得较好的抛光效果;抛光时间存在最佳值,并非越长越好;离子束入射角在一定范围内增大有利于平整度增加;较大的样品台转速会明显降低抛光效果。

There are many micropores in shale, and the micropore structures can be exposed by Ar-ion milling technology. An Ar-ion beam was applied to treat a cross-section of shale with variable acceleration voltage, milling time, incidence angle and rotation speed of the sample holder. The milling effects were observed with a scanning electron microscope (SEM). The results show that appropriately lower voltage makes a smoother milling surface, and there is an optimal milling time. Meanwhile, a higher incidence angle and lower rotation speed of the holder can improve the milling effects.

中国石化科技项目(P12014)资助。

https://doi.org/10.11781/sysydz201504525